Germane is the actinic admixture with the blueprint GeH4, and the germanium alternation of methane. It is the simplest germanium hydride and one of the a lot of advantageous compounds of germanium. Like the accompanying compounds silane and methane, germane is tetrahedral. It burns in air to aftermath GeO2 and water. Germane is a accumulation 14 hydride.

The gas decomposes abreast 600K to germanium and hydrogen. Because of its thermal lability, germane is acclimated in the semiconductor industry for the epitaxial advance of germanium by MOVPE or actinic axle epitaxy. Organogermanium precursors (e.g. isobutylgermane, alkylgermanium trichlorides, and dimethylaminogermanium trichloride) accept been advised as beneath chancy aqueous alternatives to germane for degradation of Ge-containing films by MOVPE.